Sputtering system - Home made

Location: Lab 0.2
Responsible: Sónia Pereira and Alexandra Gonçalves

Home made 13, 56 MHz RF sputtering system (RFX-600 Advanced Energy), with the following characteristics:
• Gases: Ar, O2
• Deposition of 10x10 cm substrates
• Targets size: 2 “
• Room temperature depositions or depositions with temperatures.
• Most common evaporated materials: IZO, GZO, AZO