OFERTA FORMATIVA DCM - FCT/UNL
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Sputtering system - Home made
Location: Lab 0.2
Responsible: Sónia Pereira and Alexandra Gonçalves
Description:
Home made 13, 56 MHz RF sputtering system (RFX-600 Advanced Energy), with the following characteristics:
• Gases: Ar, O2
• Deposition of 10x10 cm substrates
• Targets size: 2 “
• Room temperature depositions or depositions with temperatures.
• Most common evaporated materials: IZO, GZO, AZO
