Scanning Electron Microscopy / Energy Dispersive Spectroscopy (SEM/EDS)

Location: Lab 03 CENIMAT
Responsible: Rui Silva
A scanning electron microscope is type of microscope that produces imagens of a sample surface by scanning it with a focused bean of accelerated electrons, the primary electrons (PE). The installed SEM, Zeiss DSM 962, has three detectors (standard installation) that allow the collection of secondary electrons (SE), backscattering electrons (BSE) and X-rays photons (Xr) emitted by atoms excited by the electron beam.

- Electron gun: W filament
- Accelerating voltage: 1 –30 kV
- "Out-lens" detectors
- Operating modes: image observation with secondary or backscattered electrons; digital display of absorbed electrons; elemental chemical analysis (point, linear and area) by characteristic X-ray emission and mapping of chemical composition.
- Magnification range 30 – 50000 (max. resolution 10 nm)
- Recommended emission current range: 60-80µA
- EDS detector: Oxford INCAx-act LN2-free Analytical 10 mm2, resolution of 125 eV
- Elements detection limit: higher than B