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OFERTA FORMATIVA DCM - FCT/UNL

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» Home » Lab Facilities » Clean Room (Production) Lab

“Home-made” e-beam evaporator

Location: Clean room CEMOP – thin-film deposition lab
Responsible: Luís Pereira
 
  • AJA ATC-1300 F Sputtering
  • AJA ATC-1800 F Sputtering
  • AJA Orion-8 Sputtering
  • AnnealSys As-One 100 Rapid thermal processing
  • ELETTRORAVA PECVD
  • HOSITRAD PECVD
  • Resistive and e-beam evaporators
  • Speciality Coating PDS-2010 Parylene coater
  • “3 chamber” PECVD
  • “3 target” home-made sputtering
  • “Home-made” e-beam evaporator
  • “Pfeiffer” sputtering
NOVA School of Science and Technology
Universidade NOVA de Lisboa
2025