Agilent 4155C semiconductor parameter analyzer + Cascade Microtech M150 manual probe station

Location: Electrical Characterization Lab
Responsible: Pedro Barquinha / Asal Kiazadeh
Setup for I-V and time dependent measurements in substrates up to 6”, from room temperature to 300 °C, with dark box enclosure.
  • 4x Source-Monitor Units (SMUs), 2x Voltage-Monitor Units (VMUs) and 2x Voltage-Source Units (VSUs). Range up to 100 V / 0.1 A
  • Sweep, constant and sampling mode I and V stimulus
  • 4 manual micromanipulators with triaxial cabling (sub-pA measurement capability)
  • Thermal chuck for measurements between RT and 300 °C, with controllable ramps
  • Dark box enclosure for light and RF shielding
  • Keysight Desktop EasyExpert software for data acquisition and analysis