Zeiss Axioscope 5 optical microscope

Location: Clean room CEMOP – lithography lab
Responsible: Pedro Barquinha
Optical microscope with coded objectives for lithographic process monitoring. Up to 1000x magnification, with software for image acquisition and analysis.
-    10 W white LED light source, UV filter
-    5 objectives, 5x, 10x, 20x, 50x and 100x, ocular 10x
-    5 MP digital camera Axiocam 105 color for image acquisition, 2.2 µm x 2.2 µm pixel size
-    Software for image acquisition, linear/area measurements, composition of panoramic images and composition of images from different focal planes.