Location: Clean room CEMOP – lithography lab
Responsible: Pedro Barquinha Description: Optical microscope with coded objectives for lithographic process monitoring. Up to 1000x magnification, with software for image acquisition and analysis.
Specifications:- 10 W white LED light source, UV filter
- 5 objectives, 5x, 10x, 20x, 50x and 100x, ocular 10x
- 5 MP digital camera Axiocam 105 color for image acquisition, 2.2 µm x 2.2 µm pixel size
- Software for image acquisition, linear/area measurements, composition of panoramic images and composition of images from different focal planes.
![](/sites/www.cenimat.fct.unl.pt/files/Equipments-Images/axioscope.jpg)