Sputtering system

Location: Lab. 02
Responsible: Alexandra Gonçalves

Description:
Home made 13, 56 MHz RF sputtering system (RFX-600 Advanced Energy).

Specifications:
-    Gases: Ar, O2
-    Deposition of 10x10 cm substrates
-    Targets size: 2 “
-    Room temperature depositions or depositions with temperatures.
-    Most common evaporated materials: IZO, GZO, AZO