AFM - Asylum MFP3D

Location: Nanofabrication Lab
Responsible: Joana Pinto and Tomás Calmeiro
FLYER of  Atomic Force Microscopy

Description: The MFP-3D-SA is ideal for many applications including physics, material science, polymers, chemistry, nanolithography, bioscience, and quantitative nanoscale measurements.

Operating Modes
Contact Mode: Imaging using feedback on deflection. Height, deflection, and lateral force signals available.
AC and Dual AC™: Q-controlled imaging using feedback on amplitude. Signals include height, amplitude/phase, I/Q, deflection; both air and fluid.
Force Mode: Force curve acquisition in contact or AC mode. All signals available.
MicroAngelo: Built-in nanolithography/ nanomanipulation.
Surface Potential
Conductive AFM (CAFM) with ORCA™
Scanning Kelvin Probe Microscopy (SKPM)

Data Acquisition
Data size is limited only by the memory on the PC (i.e., 10 million point force curves and >5k x 5k point images are possible). It is possible to capture data at 5MHz for up to two million points continuously.

Scan Axes
X&Y: 90µm travel in closed loop. Closed loop position control with sensor noise <0.5nm average deviation (Adev) in a 0.1Hz-1kHz bandwidth (BW) and sensor nonlinearity <0.05% (Adev/full travel) at full scan.
Z: >15µm sensored travel in closed loop. Sensor noise <0.25nm Adev in a 0.1Hz-1kHz BW and sensor non-linearity less than 0.05% (Adev/full travel) at full scan.
Z height: noise <0.06nm Adev, 0.1Hz-1kHz BW.