Investigations of space charge distributions by atomic force microscope

TitleInvestigations of space charge distributions by atomic force microscope
Publication TypeConference Paper
Year of Publication2016
AuthorsFaliya K a, Kliem H a, Dias CJ b
Conference NameProceedings of the 2016 IEEE International Conference on Dielectrics, ICD 2016
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN Number9781509028023
KeywordsAtomic force microscopy, Charge distribution, Dielectric materials, Electric field distributions, Electric fields, Electric space charge, Kelvin probe force microscopy, Noise pollution, Noise problems, Poisson equation, Surface potential measurements

The requirement of the investigation of the space charge distribution in dielectric materials with less than one micrometer resolution draws the attention on the use of the atomic force microscope. The surface potential measurement by the Kelvin Probe Force Microscopy (KPFM) enables to calculate the space charges by solving Poisson equation for electrostatics. To overcome the noise problem in experimental data, a proper smoothing and derivative procedure has been developed to find the space charge and the electric field distribution. © 2016 IEEE.