%0 Conference Paper %B Proceedings of the 2016 IEEE International Conference on Dielectrics, ICD 2016 %D 2016 %T Investigations of space charge distributions by atomic force microscope %A Faliya, K.a %A Kliem, H.a %A Dias, C.J.b %I Institute of Electrical and Electronics Engineers Inc. %K Atomic force microscopy %K Charge distribution %K Dielectric materials %K Electric field distributions %K Electric fields %K Electric space charge %K Kelvin probe force microscopy %K Noise pollution %K Noise problems %K Poisson equation %K Surface potential measurements %P 219-222 %R 10.1109/ICD.2016.7547584 %U https://www.scopus.com/inward/record.uri?eid=2-s2.0-84987851319&doi=10.1109%2fICD.2016.7547584&partnerID=40&md5=05dd447561014ccc6d3a9e0308f8f78c %V 1 %X The requirement of the investigation of the space charge distribution in dielectric materials with less than one micrometer resolution draws the attention on the use of the atomic force microscope. The surface potential measurement by the Kelvin Probe Force Microscopy (KPFM) enables to calculate the space charges by solving Poisson equation for electrostatics. To overcome the noise problem in experimental data, a proper smoothing and derivative procedure has been developed to find the space charge and the electric field distribution. © 2016 IEEE. %Z cited By 0; Conference of 1st IEEE International Conference on Dielectrics, ICD 2016 ; Conference Date: 3 July 2016 Through 7 July 2016; Conference Code:123433 %@ 9781509028023